JPS6329031U - - Google Patents
Info
- Publication number
- JPS6329031U JPS6329031U JP12179586U JP12179586U JPS6329031U JP S6329031 U JPS6329031 U JP S6329031U JP 12179586 U JP12179586 U JP 12179586U JP 12179586 U JP12179586 U JP 12179586U JP S6329031 U JPS6329031 U JP S6329031U
- Authority
- JP
- Japan
- Prior art keywords
- equipment
- manufacturing equipment
- partition wall
- area
- clean air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 239000000428 dust Substances 0.000 claims description 5
- 238000005192 partition Methods 0.000 claims description 5
- 238000009434 installation Methods 0.000 claims 2
- 238000012423 maintenance Methods 0.000 claims 2
- 238000007599 discharging Methods 0.000 claims 1
- 238000011144 upstream manufacturing Methods 0.000 claims 1
- 239000000463 material Substances 0.000 description 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986121795U JPH0356827Y2 (en]) | 1986-08-08 | 1986-08-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986121795U JPH0356827Y2 (en]) | 1986-08-08 | 1986-08-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6329031U true JPS6329031U (en]) | 1988-02-25 |
| JPH0356827Y2 JPH0356827Y2 (en]) | 1991-12-24 |
Family
ID=31011394
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986121795U Expired JPH0356827Y2 (en]) | 1986-08-08 | 1986-08-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0356827Y2 (en]) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61168735A (ja) * | 1985-01-21 | 1986-07-30 | Hitachi Ltd | クリ−ンル−ム |
-
1986
- 1986-08-08 JP JP1986121795U patent/JPH0356827Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61168735A (ja) * | 1985-01-21 | 1986-07-30 | Hitachi Ltd | クリ−ンル−ム |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0356827Y2 (en]) | 1991-12-24 |